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> Nikon wafer loader robot NWL860 microscope inspection
Nikon wafer loader robot NWL860 microscope inspection
Nikon Wafer Loader Robot NWL860 Microscope Inspection
* Wafer Size: 8" to 6" (conforms to SEMI and JEIDA)
* Wafer Cassette: Fluoroware PA182-60MB / PA192-80M
* Inspection Modes: Micro Inspection, Tilt Macro Inspection, Back Side Center Macro Inspection, Back Side Periphery Macro Inspection
* Wafer Transfer: Robotic transfer with vacuum chuck
* Compatible microscopes: Nikon OPTIPHOT 300/200C/150, ECLIPSE L200
