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New brooks automation efem foup load port module FX2000
NEW Brooks Automation EFEM FOUP Load Port Module FX2000
This is a New Brooks Automation FOUP Load Port Module (P/N: 002-7200-21) still packed in original crate. This item is part of an EFEM (Equipment Front-End Module) system - it can be used with the FabExpress FX2000, FX3000, or FX4000. This system is used for transporting wafers and can be attached to a larger wafer processing machine. A typical system can hold up to four load ports as long the the BOLTS match. This item has not been tested by us. It was received from a semiconductor manufacturer that is no longer in business. Cosmetically, the item is new and flawless. There is mounting hardware and CD-Rom Manual included. The photos show the actual item for sale. Only what is shown in the photos is included.
* CD Manual Included (PDF Files)
* No Controller Software Needed
* Field configurable for 13 or 25-wafer FOUP
* Quick replacement/one person
* Polished Stainless Steel covers
* Easy facilities disconnect
* Clean, reliable operation with no maintenance or consumables
