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> Kla - tencor quantox - in-line electrical measurement
Kla - tencor quantox - in-line electrical measurement
In-Line Electrical Measurement System
KLA-Tencor Quantox 64100 Mainframe
SECS II/GEM Communication Interface
FEB Dissociation Light Assembly
Pentium CPU with Windows NT Installed
QTX, Lifetime map, Lifetime/Fe detection, thin oxide and gate Tox measurement
Metrabyte DAS high performance acquisition card
X/Y drive/controller chassis and motion controller card
