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Edwards boc IL70 dry semiconductor vacuum pump
The BOC Edwards iL70 iL 70 Semiconductor Dry Vacuum Pump System Rebuilt
The iL70 iL 70 Series operate under the most arduous conditions in the world fs top wafer fab manufacturing plants and have been proven to require zero periodic maintenance. The iL70 series provide applications specific to the semiconductor fabrication processes.
The iL70 iL 70 Dry Vacuum Pumps are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iL70 iL 70 system has an LCDP70 dry pump and enclosed water cooled motors. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.
Every Edwards iL70 iL 70 subfab dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. As each pump is rebuilt they are fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. All sensors are tested and the final rebuilt Edwards iL70 subfab vacuum dry pump is cleaned and painted as required. We offer rebuild subfab services to rebuild you Edwards iL70 iL 70 dry vacuum pumps. Please call our office at (***) 872-0037 for more information about our subfab rebuild service. For detailed specs and instruction manual on this Edwards iL70 iL 70 subfab pump see AVAILABLE DOWNLOADS below.
Edwards DryPump iL70 Spec Sheet.pdf
Product: The BOC Edwards iL70 iL 70 Semiconductor Dry Vacuum Pump System Rebuilt
