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> Applied materials endura 5500 metal amat sputtering
Applied materials endura 5500 metal amat sputtering
Currently configured for: 200mm Wafers
Current System SW Rev: B8.88
o CH A Cool Down / Pass Through
o CH E Orient / Degas (Lamp)
o Blade Material Type: Std Ni-coated Metal
o Spectra RGA Transpector /Probe Head Ch-D Blank-off Port
o Transfer chamber robot VHP
o Buffer / Transfer Lid hoist Option
