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> Tegal plasmod plasma etcher/asher 4" id x 6' lg quartz
Tegal plasmod plasma etcher/asher 4" id x 6' lg quartz
TEGAL Plasmod oxygen plasma cleaner, refurbished
Quartz chamber 4" diameter by 6 deep
RF Oxygen plasma cleaner with a 100 W/13.56MHz power supply
Processing generally occurs between 100 mTorr and 300 mTorr
Manual control of pump, gas flow, power and RF tuning
Nupro needle / micrometer type gas inlet adjustment
New Hastings Thermocouple Gauge with DST-06M tube
NPT Purge / Back fill connection KF 25 Vacuum connection with roughing line for pump
Installed, can be inspected and demonstrated Hayward, CA.
Includes a 30 day Warranty 1989 vintage.
