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Wafer robot rotation motor encoder high resolution


This is a Dual spindle Rotary Motor. The inner spindle is hollow and allows for vacuum use or passage of small instruments. The outer spindle rotates independent of the center one. Both drives have high resolution(>10,000) Pulses per rev optical encoders. This wafer robot is manufactured by Brooks Automation. Brooks P/N: 121669. This is designed for extremely precise rotation and would be a good choice for Nano fabrication of small rotary components. Motors and Encoders are wired independently. Since both spindles are direct drive, there is no backlash in this drive. The motors are hybrid and no specs are available. The large diameter encoders are manufactured by GSI Lumonics and are factory set. We guarantee this works perfectly and will be the most precise dual-drive motor you own.



Wafer robot rotation motor encoder high resolution Wafer robot rotation motor encoder high resolution