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Osaka TG1303 molecular vacuum pump & vat pendulum valve


Osaka TG1303 Molecular Vacuum Pump & VAT Pendulum Valve
Dimensions ( L" x W" x H" ) : Pump w/Valve - 20 x 14 x 19.5
The Pump and Valve are in Excellent near New Condition and were pulled from a working environment.
The following description was translated through google from a Japanese web page. Please forgive any poor grammar.
corrosion-resistant chemical form of exhaust gas
unexpectedly strong structure of atmospheric entry
serial communication RS232C serial standard-compliant
Safety Standards Certification NRTL / SEMI-S2/ CE
N2( ) N2 (with wire mesh protection)
<1 10 -7 / <1 10 -6 <1 10 -7 / <1 10 -6
(<7.5 10 -10 / <7.5 10 -9 ) (<7.5 10 -10 / <7.5 10 -9)
The maximum flow rate of gas 1



Osaka TG1303 molecular vacuum pump & vat pendulum valve