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> New brooks automation efem foup load port cassette +pod
New brooks automation efem foup load port cassette +pod
NEW Brooks Automation EFEM FOUP Load Port Cassette +Pod
This is a New Brooks Automation Cassette FOUP Load Port Module (002-7560-03) still packed in original crate. This item is part of an EFEM (Equipment Front-End Module) system - it can be used with the FabExpress FX2000, FX3000, or FX4000. This item was received by a semiconductor manufacturer that is no longer in business. This system is used for transporting wafers and can be attached to a larger wafer processing machine. A typical system can hold up to four load ports as long the the BOLTS match. Cosmetically, the item is new and flawless. This item has not been tested by us. The photos show a typical item for sale. There is no hardware included with this item. Only what is shown in the photos is included.
* CD Manual Copy Included (PDF Files)
* No Controller Software Needed
* 1 Keypad with 4 status indicators
