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> Ssi photoresist processing track parts unit teflon ss
Ssi photoresist processing track parts unit teflon ss
SSI photoresist processing track parts unit.
This unit was designed to clean and deposit and develop/process photo-sensitive layers on semiconductor wafers.
Inspite of the internal part with an SVG label, the external label was SSI on this.
There are a pair of Sierra Instruments 741-T-99 35 SCFM air pressure controllers on this frame. The other looks better than the one imaged. The are to provide precise constant air (suction) pressure to remove things like house vacuum and atmospheric pressure variations.
The primary module is the spin coat chamber with vacuum chuck. It looks like the majority of this is machined out of white TEFLON.
This looks like it might be a baking or heating section.
The image above looks like the main power distribution box.
The image below looks like a couple of cassette load/unload elevators.
Might be just what you need for your semiconductor wafer photo resist processing parts application.
Condition looks looks cannibalized. Sold as remaining parts only.